Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2022/153696
Kind Code:
A1
Abstract:
This MEMS switch comprises: a substrate that has a cavity formed in the interior thereof and that has a first principal surface and a second principal surface on the opposite side thereof; a flexible part that is flexible and is fixed in a floating state with respect to the cavity on the first principal surface side of the substrate and extends in a first direction intersecting with the thickness direction of the substrate; a first piezoelectric element and a second piezoelectric element that are formed on the flexible part so as to extend lined up along the first direction, and can extend and contract along the first direction; a linking member that is linked to the flexible part and can be displaced by deformation of the flexible part in a second direction intersecting with the first direction and the thickness direction of the substrate; a movable contact provided to the linking member; and a fixed contact that faces the movable contact in the second direction and allows for contact and non-contact with the movable contact through displacement of the linking member.
Inventors:
MATSUSHIMA OSAMU (JP)
FUJIMORI YOSHIKAZU (JP)
FUJIMORI YOSHIKAZU (JP)
Application Number:
PCT/JP2021/043953
Publication Date:
July 21, 2022
Filing Date:
November 30, 2021
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
H01H57/00; H01H59/00
Foreign References:
| JP2009252516A | 2009-10-29 | |||
| JP2009118627A | 2009-05-28 | |||
| JP2009170677A | 2009-07-30 | |||
| JP2006294866A | 2006-10-26 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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