Title:
MEMS WAVEFORM GENERATOR AND ADIABATIC LOGIC CIRCUITS USING THE SAME
Document Type and Number:
WIPO Patent Application WO2005114840
Kind Code:
A3
Abstract:
A micro-electromechanical system (MEMS) waveform generator is provided. The MEMS waveform generator includes a plurality of capacitive sensors. Each of the plurality of capacitive sensors has a movable sensor portion and a corresponding fixed sensor portion. The movable and fixed sensor portions each have a plurality of electrically conductive features. One or more of the electrically conductive features has one or more predetermined non-uniform portions. The MEMS waveform generator further includes an actuator that receives a time-varying input signal and causes each movable sensor portion to move relative to a corresponding fixed sensor portion in response to the time-varying signal. The waveform generator provides a mechanism of synthesizing non-sinusoidal periodic waveforms in an energy-efficient manner. In the context of one exemplary application, the waveform generator provides a mechanism for driving adiabatic logic circuits with extremely low total power dissipation at a given level of performance.
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Inventors:
FRANK MICHAEL PATRICK (US)
XIE HUKAI (US)
XIE HUKAI (US)
Application Number:
PCT/US2005/016329
Publication Date:
February 09, 2006
Filing Date:
May 12, 2005
Export Citation:
Assignee:
UNIV FLORIDA RES FOUDATION INC (US)
FRANK MICHAEL PATRICK (US)
XIE HUKAI (US)
FRANK MICHAEL PATRICK (US)
XIE HUKAI (US)
International Classes:
B81B3/00; G01R19/00; H03K19/00; (IPC1-7): B81B3/00
Foreign References:
| US6686639B1 | 2004-02-03 |
Other References:
XIE H ET AL: "Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 95, no. 2-3, 1 January 2002 (2002-01-01), pages 212 - 221, XP004377894, ISSN: 0924-4247
HUIKAI XIE ET AL: "POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 11, no. 2, April 2002 (2002-04-01), pages 93 - 101, XP001125202, ISSN: 1057-7157
MUKHERJEE T ET AL: "HIERARCHICAL DESIGN AND TEST OF INTEGRATED MICROSYSTEMS", IEEE DESIGN & TEST OF COMPUTERS, IEEE COMPUTERS SOCIETY. LOS ALAMITOS, US, vol. 16, no. 4, October 1999 (1999-10-01), pages 18 - 27, XP000920110, ISSN: 0740-7475
HUIKAI XIE ET AL: "POST-CMOS PROCESSING FOR HIGH-ASPECT-RATIO INTEGRATED SILICON MICROSTRUCTURES", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 11, no. 2, April 2002 (2002-04-01), pages 93 - 101, XP001125202, ISSN: 1057-7157
MUKHERJEE T ET AL: "HIERARCHICAL DESIGN AND TEST OF INTEGRATED MICROSYSTEMS", IEEE DESIGN & TEST OF COMPUTERS, IEEE COMPUTERS SOCIETY. LOS ALAMITOS, US, vol. 16, no. 4, October 1999 (1999-10-01), pages 18 - 27, XP000920110, ISSN: 0740-7475
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