Title:
METAL ALKOXIDE COMPOUND, THIN FILM-FORMING STARTING MATERIAL, METHOD FOR PRODUCING THIN FILM, AND ALCOHOL COMPOUND
Document Type and Number:
WIPO Patent Application WO/2014/077089
Kind Code:
A1
Abstract:
The present invention provides a metal alkoxide compound which has physical properties suitable for a starting material for forming a thin film by a CVD method, in particular, a metal alkoxide compound which has physical properties suitable for a starting material for forming a copper metal thin film. The present invention specifically provides a metal alkoxide compound which is represented by general formula (I) and a thin film-forming starting material which contains the metal alkoxide compound. (In the formula, R1 represents a methyl group or an ethyl group; R2 represents a hydrogen atom or a methyl group; R3 represents a linear or branched alkyl group having 1-3 carbon atoms; M represents a metal atom or a silicon atom; and n represents the valence of the metal atom or the silicon atom.)
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Inventors:
SAKURAI ATSUSHI (JP)
HATASE MASAKO (JP)
YAMADA NAOKI (JP)
SHIRATORI TSUBASA (JP)
SAITO AKIO (JP)
YOSHINO TOMOHARU (JP)
HATASE MASAKO (JP)
YAMADA NAOKI (JP)
SHIRATORI TSUBASA (JP)
SAITO AKIO (JP)
YOSHINO TOMOHARU (JP)
Application Number:
PCT/JP2013/078493
Publication Date:
May 22, 2014
Filing Date:
October 21, 2013
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07C251/08; C23C16/16; C23C16/40; H01L21/28; H01L21/285; C07F1/08; C07F15/04; C07F15/06
Domestic Patent References:
| WO2005085175A1 | 2005-09-15 |
Foreign References:
| JP2006328019A | 2006-12-07 | |||
| US6982341B1 | 2006-01-03 | |||
| JP2006143693A | 2006-06-08 | |||
| JP2006249046A | 2006-09-21 | |||
| JPS4961108A | 1974-06-13 | |||
| JP2013216614A | 2013-10-24 | |||
| JP2013032309A | 2013-02-14 | |||
| US20080171890A1 | 2008-07-17 | |||
| KR100675983B1 | 2007-01-30 | |||
| JP2006328019A | 2006-12-07 |
Other References:
"COMPOUND 11", IZVESTIYA AKADEMII NAUK SSSR, SERIYA KHIMICHESKAYA, vol. 1, 1 January 1974 (1974-01-01), USSR, pages 206 - 208, XP008178836
"COMPOUND 8A", UKRAINSKII KHIMICHESKII ZHURNAL (RUSSIAN EDITION), vol. 47, no. 9, 1 January 1981 (1981-01-01), pages 959 - 961, XP008178834
See also references of EP 2921472A4
"COMPOUND 8A", UKRAINSKII KHIMICHESKII ZHURNAL (RUSSIAN EDITION), vol. 47, no. 9, 1 January 1981 (1981-01-01), pages 959 - 961, XP008178834
See also references of EP 2921472A4
Attorney, Agent or Firm:
HATORI, Osamu (JP)
Osamu Hatori (JP)
Osamu Hatori (JP)
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