Title:
METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM
Document Type and Number:
WIPO Patent Application WO/2022/264847
Kind Code:
A1
Abstract:
A metal-containing film according to the present invention has a laminate structure that is formed by alternately layering a first metal-containing unit film, which has a film thickness of less than the critical diameter of crystal nucleation, and a second metal-containing unit film, which differs from the first metal-containing unit film and which has a film thickness of less than the critical diameter of crystal nucleation, and that does not contain a crystal grain boundary.
Inventors:
AKIYAMA KOJI (JP)
TAMURA CHIHIRO (JP)
ASHIZAWA HIROAKI (JP)
TAMURA CHIHIRO (JP)
ASHIZAWA HIROAKI (JP)
Application Number:
PCT/JP2022/022760
Publication Date:
December 22, 2022
Filing Date:
June 06, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L23/532; H01L21/28; H01L21/3205; H01L21/768; H01L27/108; C23C14/06; C23C14/14; C23C16/06; C23C16/34; H01L21/285; H01L27/04
Foreign References:
| US20050070097A1 | 2005-03-31 | |||
| JP2002329680A | 2002-11-15 | |||
| JP2005294321A | 2005-10-20 | |||
| JP2003324148A | 2003-11-14 | |||
| JPH0461125A | 1992-02-27 | |||
| JPS63155743A | 1988-06-28 |
Attorney, Agent or Firm:
TAKAYAMA Hiroshi (JP)
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