Title:
METAL-CONTAMINATION PREVENTIVE AGENT, METAL-CONTAMINATION PREVENTIVE MEMBRANE, METAL-CONTAMINATION PREVENTIVE METHOD, AND PRODUCT-CLEANSING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/056947
Kind Code:
A1
Abstract:
The present invention reduces the adhesiveness of trace metals in ultrapure water for cleansing products, and inhibits the metal contamination of an object to be cleansed. Provided is a metal-contamination preventive agent that contains a polymer having an ion-exchange group, such as a polystyrene sulfonate having a molecular weight of at least 100,000. Trace metals in ultrapure water are adsorbed through an ion-exchange reaction of the polymer having the ion-exchange group, and can thus be inhibited from adhering to products. Also provided is a product-cleansing method for cleansing products with ultrapure water to which said metal-contamination preventive agent has been added. Preferably, the ultrapure water to which the metal-contamination preventive agent has been added flows through a separation membrane module, and the products are cleansed with the membrane-permeated water.
Inventors:
MORITA HIROSHI (JP)
KATO TOSHIMASA (JP)
HOSHI SHIGEYUKI (JP)
KATO TOSHIMASA (JP)
HOSHI SHIGEYUKI (JP)
Application Number:
PCT/JP2016/076823
Publication Date:
April 06, 2017
Filing Date:
September 12, 2016
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
C02F1/42; B01J39/04; B01J41/04; B01J47/12; C02F1/44; C02F1/62; H01L21/304
Foreign References:
| JP2001047066A | 2001-02-20 | |||
| JP2011231163A | 2011-11-17 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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