Title:
METAL LAYER STRUCTURE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/169136
Kind Code:
A1
Abstract:
The metal layer structure according to the present invention includes: a first metal layer formed on a substrate; a first protective layer comprising an oxide layer, a nitride layer, a carbide layer, or a fluoride layer, the first protective layer being formed on the first metal layer; a second metal layer comprising the same material as the first metal layer, the second metal layer being formed on the first protective layer; and a second protective layer comprising an oxide layer, a nitride layer, a carbide layer, or a fluoride layer, the second protective layer being formed on the second metal layer.
Inventors:
WATANABE KUNIHIKO
NISHIDA KENICHIROU
NISHIDA KENICHIROU
Application Number:
PCT/JP2017/004399
Publication Date:
October 05, 2017
Filing Date:
February 07, 2017
Export Citation:
Assignee:
PANASONIC LIQUID CRYSTAL DISPL (JP)
International Classes:
C23C28/00; B32B9/00; B32B15/04; C23C8/12; C23C14/14; C23C14/58; H01L21/3205; H01L21/768; H01L23/532
Domestic Patent References:
| WO2014049891A1 | 2014-04-03 | |||
| WO2011001983A1 | 2011-01-06 |
Foreign References:
| JP2012009873A | 2012-01-12 |
Attorney, Agent or Firm:
HARUKA PATENT & TRADEMARK ATTORNEYS (JP)
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