Title:
METAL MATERIAL, METHOD OF PRODUCING METAL MATERIAL, METHOD OF PASSIVATING SEMICONDUCTOR PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING FILLED CONTAINER
Document Type and Number:
WIPO Patent Application WO/2021/140757
Kind Code:
A1
Abstract:
A metal material of the present disclosure comprises: a metal substrate; and a film disposed on the surface of the metal substrate, and containing a fluorine-containing molybdenum compound, wherein the fluorine-containing molybdenum compound is represented by general formula MoOxFy (where x is a number of 0 to 2, and y is a number of 2 to 5).
Inventors:
KIKUCHI AKIOU (JP)
NOMURA RYOMA (JP)
YOSHIMURA RYOTA (JP)
NOMURA RYOMA (JP)
YOSHIMURA RYOTA (JP)
Application Number:
PCT/JP2020/043200
Publication Date:
July 15, 2021
Filing Date:
November 19, 2020
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
International Classes:
C23C26/00
Domestic Patent References:
| WO2019012841A1 | 2019-01-17 |
Foreign References:
| JP2001172020A | 2001-06-26 | |||
| JPH04342423A | 1992-11-27 | |||
| JP2014086579A | 2014-05-12 | |||
| JPS6013074A | 1985-01-23 |
Attorney, Agent or Firm:
YASUTOMI & ASSOCIATES (JP)
Download PDF: