Title:
METAL NITRIDE FILM FOR OXYGEN SENSOR AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/141168
Kind Code:
A1
Abstract:
The present invention relates to the technical field of oxygen sensors, and provides a preparation method for a metal nitride film for an oxygen sensor. The metal nitride film is used for replacing existing noble metal catalysts to reduce costs. The present invention provides the preparation method for the metal nitride film for the oxygen sensor, comprising the following steps of: pretreating a base material; placing the base material in a working cavity, and performing vacuumizing; heating the working cavity, and rotating the base material at the same time; introducing a mixed atmosphere of argon and nitrogen into the working cavity; and first sputtering a core target material on the base material by means of a direct-current power supply, and then sputtering a doped target material by means of a radio-frequency power supply to form a metal nitride film, the core target material and the doped target material being selected from one or more of zirconium, titanium, vanadium, tantalum, and molybdenum, and the core target material and the doped target material being selected from different metals. The metal nitride film for the oxygen sensor prepared in the present invention has good response speed, linearity, consistency, and stability when being used as an electrode material in the oxygen sensor.
Inventors:
ZHANG BIN (CN)
ZHAO LUOHENG (CN)
HE WEISHENG (CN)
SUN ZHAOHONG (CN)
MA PENGFEI (CN)
LIU GUANGLIANG (CN)
QIU GUOCAI (CN)
ZHENG XIAOYIN (CN)
LIU XINYA (CN)
ZHANG YUNLONG (CN)
FENG ZHENLI (CN)
CHEN XINZHUN (CN)
LI XIULONG (CN)
FU WANGYONG (CN)
LI GUONING (CN)
ZHOU HAIDONG (CN)
WU KAIPING (CN)
ZHAO LUOHENG (CN)
HE WEISHENG (CN)
SUN ZHAOHONG (CN)
MA PENGFEI (CN)
LIU GUANGLIANG (CN)
QIU GUOCAI (CN)
ZHENG XIAOYIN (CN)
LIU XINYA (CN)
ZHANG YUNLONG (CN)
FENG ZHENLI (CN)
CHEN XINZHUN (CN)
LI XIULONG (CN)
FU WANGYONG (CN)
LI GUONING (CN)
ZHOU HAIDONG (CN)
WU KAIPING (CN)
Application Number:
PCT/CN2020/141309
Publication Date:
July 07, 2022
Filing Date:
December 30, 2020
Export Citation:
Assignee:
GUANGZHOU AOSONG ELECTRONIC CO LTD (CN)
International Classes:
G01N27/409; B01J27/24; C23C14/06; C23C14/35
Foreign References:
| CN106770585A | 2017-05-31 | |||
| CN104089981A | 2014-10-08 | |||
| CN106082696A | 2016-11-09 | |||
| JP2005035128A | 2005-02-10 |
Attorney, Agent or Firm:
GUANGZHOU RUNHE INTELLECTUAL PROPERTY AGENCY (GENERAL PARTNERSHIP) (CN)
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