Title:
METAL PLATE DEPOSITION MASK FOR OLED PIXEL DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2020/013643
Kind Code:
A1
Abstract:
An embodiment relates to a metal deposition mask for OLED pixel deposition, the deposition mask comprising a deposition region for forming a deposition pattern and a non-deposition region other than the deposition region, wherein: the deposition region comprises a plurality of effective portions arranged along the longitudinal direction to be spaced apart from each other and including multiple through-holes formed therethrough, and an ineffective portion other than the effective portions; the through-holes comprise a small surface hole formed through one surface of the deposition mask, a large surface hole formed through the other surface of the deposition mask, which is opposite to the one surface, and a connection portion at which the boundaries of the small surface hole and the large surface hole are connected to each other; and the inner surface of at least one of the small surface hole and the large surface hole has a root mean square (RMS) surface roughness smaller than 150 nm.
Inventors:
CHANG WOO YOUNG (KR)
PAIK JEE HEUM (KR)
KANG JI HOON (KR)
GWAK JUNG MIN (KR)
PAIK JEE HEUM (KR)
KANG JI HOON (KR)
GWAK JUNG MIN (KR)
Application Number:
PCT/KR2019/008596
Publication Date:
January 16, 2020
Filing Date:
July 11, 2019
Export Citation:
Assignee:
LG INNOTEK CO LTD (KR)
International Classes:
H01L51/56; C23C14/24; H01L21/02; H01L21/033; H01L51/00
Domestic Patent References:
| WO2016171337A1 | 2016-10-27 |
Foreign References:
| KR20180030112A | 2018-03-21 | |||
| KR20160081136A | 2016-07-08 | |||
| KR20180053463A | 2018-05-23 | |||
| KR20180054952A | 2018-05-25 |
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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