Title:
METALENS, METHOD FOR MANUFACTURING METALENS, ELECTRONIC INSTRUMENT, AND METHOD FOR DESIGNING METALENS
Document Type and Number:
WIPO Patent Application WO/2024/014272
Kind Code:
A1
Abstract:
A method for manufacturing a metalens, according to the present invention, includes: a mask-pattern formation step for forming a mask pattern on a silicon layer of a substrate having the silicon layer on a surface thereof; an etching step for etching the silicon layer to form a silicon pattern layer having an array pattern comprising a plurality of silicon pillars or a plurality of unoxidized pores; and an oxidation treatment step for oxidizing at least a portion of the silicon in the silicon pattern layer to form a pattern layer comprising a plurality of oxidized silicon pillars or a plurality of pores. The pattern layer has a focal point for light that is incident on the pattern layer.
Inventors:
KANAMORI YOSHIAKI (JP)
OKATANI TAIYU (JP)
OKATANI TAIYU (JP)
Application Number:
PCT/JP2023/023619
Publication Date:
January 18, 2024
Filing Date:
June 26, 2023
Export Citation:
Assignee:
UNIV TOHOKU (JP)
International Classes:
G02B3/00; G02B1/02
Foreign References:
| US20180216797A1 | 2018-08-02 | |||
| JP2020536722A | 2020-12-17 | |||
| JP2021071727A | 2021-05-06 |
Other References:
PARK JOON-SUH, ZHANG SHUYAN, SHE ALAN, CHEN WEI TING, LIN PENG, YOUSEF KEROLOS M. A., CHENG JI-XIN, CAPASSO FEDERICO: "All-Glass, Large Metalens at Visible Wavelength Using Deep-Ultraviolet Projection Lithography", NANO LETTERS, AMERICAN CHEMICAL SOCIETY, US, vol. 19, no. 12, 11 December 2019 (2019-12-11), US , pages 8673 - 8682, XP093127273, ISSN: 1530-6984, DOI: 10.1021/acs.nanolett.9b03333
YE SHUJUN, YAMABE KIKUO, ENDOH TETSUO: "Oxidation of Silicon Nanopillars", THE JOURNAL OF PHYSICAL CHEMISTRY C, AMERICAN CHEMICAL SOCIETY, US, vol. 125, no. 16, 29 April 2021 (2021-04-29), US , pages 8853 - 8861, XP093127278, ISSN: 1932-7447, DOI: 10.1021/acs.jpcc.1c01514
GUO HUIFANG, YUE SONG, WANG RAN, HOU YU, LI MAN, ZHANG KUNPENG, ZHANG ZICHEN: "Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region", NANOMATERIALS, MDPI, vol. 11, no. 5, pages 1243, XP093127281, ISSN: 2079-4991, DOI: 10.3390/nano11051243
NANAE YAMASHITA, HIDEAKI KOMIYAMA, YONGBIN ZHAO, MOTONORI KOMURA, TOMOKAZU IYODA, KEIJI NAGAI: "Perpendicularly Oriented SiO 2 Nanopillar Array on SiO 2 Adhesive Layer", TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, SOBUNSHA, TOKYO, JP, vol. 37, no. 3, 1 January 2012 (2012-01-01), JP , pages 421 - 424, XP093127285, ISSN: 1382-3469, DOI: 10.14723/tmrsj.37.421
YE SHUJUN, YAMABE KIKUO, ENDOH TETSUO: "Oxidation of Silicon Nanopillars", THE JOURNAL OF PHYSICAL CHEMISTRY C, AMERICAN CHEMICAL SOCIETY, US, vol. 125, no. 16, 29 April 2021 (2021-04-29), US , pages 8853 - 8861, XP093127278, ISSN: 1932-7447, DOI: 10.1021/acs.jpcc.1c01514
GUO HUIFANG, YUE SONG, WANG RAN, HOU YU, LI MAN, ZHANG KUNPENG, ZHANG ZICHEN: "Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region", NANOMATERIALS, MDPI, vol. 11, no. 5, pages 1243, XP093127281, ISSN: 2079-4991, DOI: 10.3390/nano11051243
NANAE YAMASHITA, HIDEAKI KOMIYAMA, YONGBIN ZHAO, MOTONORI KOMURA, TOMOKAZU IYODA, KEIJI NAGAI: "Perpendicularly Oriented SiO 2 Nanopillar Array on SiO 2 Adhesive Layer", TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, SOBUNSHA, TOKYO, JP, vol. 37, no. 3, 1 January 2012 (2012-01-01), JP , pages 421 - 424, XP093127285, ISSN: 1382-3469, DOI: 10.14723/tmrsj.37.421
Attorney, Agent or Firm:
TAZAKI Akira et al. (JP)
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