Title:
METALLO-OXOMERIC SCRUBBER COMPOSITIONS, AND METHOD OF GAS PURIFICATION UTILIZING SAME
Document Type and Number:
WIPO Patent Application WO/1995/018674
Kind Code:
A1
Abstract:
Scavengers for removing acidic or corrosive gaseous components from semiconductor process effluents comprising a metallic macromer comprising a covalently bonded complex of (i) metal coordination atoms linked to (ii) oxomeric moieties selected from the group consisting of carbonate, sulfite, carboxylate, and silicate, and methods for synthesizing these scavengers. A method for cleaning an exhaust gas containing at least one corrosive or acidic gaseous component selected from the group consisting of hydrogen halide, chlorine, boron trihalide, thionyl chloride, and tungsten hexafluoride, which comprises contacting the exhaust gas with the metallic macromer scavenger compositions.
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Inventors:
FISCHER H ERIC
Application Number:
PCT/US1995/000171
Publication Date:
July 13, 1995
Filing Date:
January 06, 1995
Export Citation:
Assignee:
ATMI ECOSYS CORP (US)
International Classes:
B01D15/02; B01D53/68; B01D53/70; B01J20/02; C01B32/60; C01B33/20; B01D53/40; (IPC1-7): B01J20/10; B01J20/22; B01J20/02; B01D53/40; B01D53/44; B01D53/64; C01B31/24; C01B33/20
Foreign References:
| EP0303368A1 | 1989-02-15 | |||
| US4657752A | 1987-04-14 | |||
| US5143706A | 1992-09-01 | |||
| US4113652A | 1978-09-12 |
Other References:
KIRK-OTHMER'S, "Encyclopedia of Chemical Technology", 3rd Edition, Volume 13, pages 764-765, 1983.
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