(METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS

Title:

(METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS

Document Type and Number:

WIPO Patent Application WO/2002/046179

Kind Code:

A1

Abstract:

(Meth)acrylate esters represented by the general formula (1). These esters can be prepared by preparing a product of addition of a 1,3-diene with maleic anhydride by Diels-Alder reaction, reducing this product into a lactone, hydrating this lactone into an alcohol, and esterifying this alcohol with (meth)acrylic acid. The (co)polymers produced by (co)- polymerizing monomer compositions containing the (meth)- acrylate esters are excellent in transparency, dry-etching resistance, and solubility in organic solvents, and useful as resins for chemically amplifiable resist compositions. (1) (In the general formula (1), R?1¿, R?2¿, R?3¿, and R?4¿ are each hydrogen, methyl, or ethyl; one of X?1¿ and X?2¿ is (meth)acryloyloxy and the other is hydrogen; and both A?1¿ and A?2¿ are hydrogen, or alternatively A?1¿ and A?2¿ are united to form -O-, -CH¿2?-, or -CH¿2?CH¿2?-.)

More Like This:

JPS5949231	[Title of the Invention] A manufacturing method of lid A ride
WO/2005/042507	BIS &lcub 6-(1,3-DIHYDRO-4-HYDROXY-6-METHOXY-7-METHYL-3-OXO-5-ISOBENZOFURANYL)-4-METHYL-, (4E)-4-HEXENOIC ACID&rcub ZINC SALT
WO/2006/012379	PROCESSES FOR PREPARATION OF CRYSTALLINE MYCOPHENOLATE SODIUM

Inventors:

KAMON YOSHIHIRO (JP)
FUJIWARA TADAYUKI (JP)
KUWANO HIDEAKI (JP)
MOMOSE HIKARU (JP)
KOIZUMI ATSUSHI (JP)

Application Number:

PCT/JP2001/010628

Publication Date:

June 13, 2002

Filing Date:

December 05, 2001

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MITSUBISHI RAYON CO (JP)
KAMON YOSHIHIRO (JP)
FUJIWARA TADAYUKI (JP)
KUWANO HIDEAKI (JP)
MOMOSE HIKARU (JP)
KOIZUMI ATSUSHI (JP)

International Classes:

C07D307/88; C07D307/93; C07D493/18; C08F220/18; C08F220/28; G03F7/039; (IPC1-7): C07D307/93; C07D307/77; C07D307/88; C07D493/18

Foreign References:

US4187236A	1980-02-05
JP2002006502A	2002-01-09

Other References:

MORI, K. ET AL.: "Synthetic microbial chemistry. XXV. synthesis of the enantiomers of differolide (4-(2',5'-dihydro-2'-oxo-3'-furanyl)-3a,4,5,6-tetrahydro-1(3H)-isobenzofuranone), a microbial bioregulators for the formation of aerial mycelium and spores of streptomyces.....", LIEBIGS ANN. CHEM., no. 6, 1993, pages 671 - 681, XP002909332
NUMATA, A. ET AL.: "Synthesis of pyrolysis products of bisdehydrodihydroenmein. I. synthesis of 6-hydroxy-7-methylphthalide and 2-(hydroxymethyl)-6,6-dimethyl-5-oxo-1-cyclohexenecarboxylic acid lactone", YAKUGAKU ZASSHI, vol. 88, no. 9, 1968, pages 1151 - 1162, XP002909340
See also references of EP 1352904A4

Attorney, Agent or Firm:

Kaneda, Nobuyuki (16th Kowa Bldg. 9-20 Akasaka 1-chome Minato-ku, Tokyo, JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: BENZOFURAN AND BENZOTHIOPHENE DERIVATIVES AS SELECTIVE COX-2 INHIBITORS

Next Patent: KLAINETIN AND DERIVATIVES THEREOF, METHOD FOR THEIR PRODUCTION AND THE USE OF THE SAME