Title:
METHOD FOR ALIGNING OFF-AXIS OPTICAL SYSTEM HAVING ANGLE OF INCIDENCE
Document Type and Number:
WIPO Patent Application WO/2023/167384
Kind Code:
A1
Abstract:
The present invention relates to a method for aligning an off-axis optical system having an angle of incidence. A method for aligning an off-axis optical system having an angle of incidence according to the present invention comprises: a disk arranging step of arranging a first disk having an on-axis through-hole and an off-axis through-hole formed therein on a path of incidence of light, and arranging the first disk having an on-axis through-hole and an off-axis through-hole formed therein on a path of reflection of light; a sample aligning step of adjusting the height and inclination of a sample such that, when light that has passed through the through-holes of the first disk is emitted to the surface of the sample and reflected thereby, the resulting light passes through corresponding through-holes of a second disk; and an off-axis lens aligning step of installing a first off-axis lens downstream of the optical path of the first disk, installing a second off-axis lens upstream of the optical path of the second disk, and aligning the first and second off-axis lenses such that light that has passed through the off-axis through-hole of the first disk and then reflected by the sample passes through the off-axis through-hole of the second disk.
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Inventors:
SEONG JUN JE (KR)
KIM SANG JUN (KR)
KWON DAE WON (US)
KIM SANG JUN (KR)
KWON DAE WON (US)
Application Number:
PCT/KR2022/013679
Publication Date:
September 07, 2023
Filing Date:
September 14, 2022
Export Citation:
Assignee:
AUROS TECH INC (KR)
International Classes:
G02B7/00; G01B11/06; G01N21/88; G01N21/95; G02B27/64
Foreign References:
| KR20150098794A | 2015-08-31 | |||
| KR20210048528A | 2021-05-03 | |||
| KR20120044376A | 2012-05-07 | |||
| KR20110030143A | 2011-03-23 | |||
| JP2011508241A | 2011-03-10 |
Attorney, Agent or Firm:
DYNE PATENT & LAW FIRM (KR)
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