Title:
METHOD AND APPARATUS FOR COATING INNER SURFACE
Document Type and Number:
WIPO Patent Application WO/2017/057775
Kind Code:
A1
Abstract:
This method is for forming an oxide film on the inner surface of a container or a pipe-like object to be treated. A joint part is connected to a connection tube that is to be connected to at least one object to be treated to create a sealed environment in the object. The joint part is connected to an air discharge means for discharging gas in the object to be treated, an organic metal gas introduction means for introducing organic metal gas into the object to fill the object therewith, and a humidified gas introduction means for introducing an excited humidified gas into the object to be treated to fill the object therewith. The method comprises steps of: (1) introducing the organic metal gas into the object by the organic metal gas introduction means; (2) discharging the organic metal gas in the object by the air discharge means; (3) introducing the excited humidified gas into the object by the humidified gas introduction means; and (4) discharging the humidified gas in the object by the air discharge means. Steps (1) to (4) are repeated in order to form an oxide film on the inner surface of the object.
Inventors:
HIROSE FUMIHIKO (JP)
Application Number:
PCT/JP2016/079289
Publication Date:
April 06, 2017
Filing Date:
October 03, 2016
Export Citation:
Assignee:
UNIV YAMAGATA (JP)
International Classes:
C23C16/40; C23C26/00; H01L21/205
Foreign References:
| JP2012096432A | 2012-05-24 | |||
| JPS60186013A | 1985-09-21 | |||
| JP2001284265A | 2001-10-12 | |||
| JP2016124576A | 2016-07-11 |
Other References:
M. DEGAI ET AL.: "Non-heating atomic layer deposition of Si02 using tris(dimethylamino) silane and plasma-excited water vapor", THIN SOLID FILMS, vol. 525, 2012, pages 73 - 76, XP055385394
FUMIHIKO HIROSE: "Shitsuon Genshiso Taisekiho o Mochiita Boshoku Coating", IEICE TECHNICAL REPORT, vol. 114, no. 202, 28 August 2014 (2014-08-28), pages 75 - 77
KENSAKU KANOMATA: "Investigation of room temperature silica coating for flexible and soft materials", IEICE TECHNICAL REPORT, vol. 113, no. 9, 11 April 2013 (2013-04-11), pages 55 - 57
FUMIHIKO HIROSE: "Shitsuon Genshiso Taisekiho o Mochiita Boshoku Coating", IEICE TECHNICAL REPORT, vol. 114, no. 202, 28 August 2014 (2014-08-28), pages 75 - 77
KENSAKU KANOMATA: "Investigation of room temperature silica coating for flexible and soft materials", IEICE TECHNICAL REPORT, vol. 113, no. 9, 11 April 2013 (2013-04-11), pages 55 - 57
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
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