Title:
METHOD AND APPARATUS FOR CONTROLLING NUCLEATION IN SELF-ASSEMBLED FILMS
Document Type and Number:
WIPO Patent Application WO2007001294
Kind Code:
A8
Abstract:
A method of forming a self-assembled film with periodic nanometer dimension features (e.g., holes) on a substrate includes the steps of providing film precursors on the substrate, wherein the film precursors are maintained in an amorphous state. Where the film precursors are block copolymers, a heating member is provided. The substrate and the heating member are then moved relative to one another so as to raise the temperature of a portion of the film precursor on the substrate above its glass transition temperature. Relative movement between the substrate and heating member continues until a self-assembled crystalline film is formed over the surface of the substrate. In an alternative embodiment, a pH dispensing member is provided to dispense a pH adjusting agent onto the substrate that promotes self-assembly of a crystalline film.
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Inventors:
XIE YA-HONG (US)
Application Number:
PCT/US2005/022659
Publication Date:
May 08, 2008
Filing Date:
June 28, 2005
Export Citation:
Assignee:
UNIV CALIFORNIA (US)
XIE YA-HONG (US)
XIE YA-HONG (US)
International Classes:
B05D3/02
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