Title:
METHOD AND APPARATUS HAVING PIN ELECTRODE FOR SURFACE TREATMENT USING CAPILLARY DISCHARGE PLASMA
Document Type and Number:
WIPO Patent Application WO2002061787
Kind Code:
A3
Abstract:
A method and an apparatus for treating a workpiece using a plasma are disclosed in the present invention. In treating a workpiece using a plasma, the apparatus includes at least one pin electrode (11) for receiving a power source(10), a dielectric body (12) having first and second sides, wherein the first side is coupled to the pin electrode (11) and the second side has at least one capillary (13) extending to a direction of the first side of the dielectric body, and each capillary (13) is substantially aligned with each pin electrode (11), and a counter electrode (15) electrically coupled to the pin electrode for generating the plasma from each capillary.
Inventors:
KIM STEVEN (US)
SONG SEOK-KYUN (US)
YU DONG WOO (US)
SONG SEOK-KYUN (US)
YU DONG WOO (US)
Application Number:
PCT/US2002/002622
Publication Date:
March 13, 2003
Filing Date:
January 31, 2002
Export Citation:
Assignee:
PLASMION CORP (US)
KIM STEVEN (US)
SONG SEOK-KYUN (US)
YU DONG WOO (US)
KIM STEVEN (US)
SONG SEOK-KYUN (US)
YU DONG WOO (US)
International Classes:
C23C16/455; C23C16/503; H01J37/32; C23C16/44; H05K3/00; (IPC1-7): H05H1/24; H01J37/32
Domestic Patent References:
| WO2001044790A1 | 2001-06-21 | |||
| WO2000079843A1 | 2000-12-28 |
Foreign References:
| DE19727883A1 | 1998-01-29 | |||
| US4201921A | 1980-05-06 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 0061, no. 44 3 August 1982 (1982-08-03)
PATENT ABSTRACTS OF JAPAN vol. 0130, no. 44 31 January 1989 (1989-01-31)
PATENT ABSTRACTS OF JAPAN vol. 0130, no. 44 31 January 1989 (1989-01-31)
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