Title:
METHOD AND APPARATUS FOR MEASURING OXIDANT CONCENTRATION, AND ELECTRONIC MATERIAL CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/114188
Kind Code:
A1
Abstract:
To simply, stably and accurately measure an oxidant concentration in an oxidizing cleaning liquid without being affected by impurities such as metals included therein, said oxidizing cleaning liquid being used in a cleaning step of an electronic material. A method for measuring an oxidant concentration in a sample liquid that is used as a cleaning liquid for an electronic material cleaning step, wherein at least some of the oxidant in the sample liquid is decomposed by heating or the like and the amount of diffused oxygen gas generated by the decomposition of the oxidant is measured, and the oxidant concentration of the sample liquid is determined on the basis of the measured value.
Inventors:
MORITA HIROSHI (JP)
OGAWA YUICHI (JP)
SASAKI YUYA (JP)
OGAWA YUICHI (JP)
SASAKI YUYA (JP)
Application Number:
PCT/JP2016/050216
Publication Date:
July 21, 2016
Filing Date:
January 06, 2016
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
G01N31/00; G01N31/10; G01N31/12; H01L21/304
Domestic Patent References:
| WO2015012041A1 | 2015-01-29 |
Foreign References:
| JP2012189320A | 2012-10-04 | |||
| JPH0755789A | 1995-03-03 | |||
| JPH02110367A | 1990-04-23 | |||
| JP2013253888A | 2013-12-19 | |||
| JPH1151931A | 1999-02-26 | |||
| JPH07928Y2 | 1995-01-11 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
Takeshi Shigeno (JP)
Takeshi Shigeno (JP)
Download PDF:
Previous Patent: LENS UNIT
Next Patent: SILVER-COATED RESIN PARTICLES, METHOD FOR MANUFACTURING SAME, AND ELECTROCONDUCTIVE PASTE USING SAME
Next Patent: SILVER-COATED RESIN PARTICLES, METHOD FOR MANUFACTURING SAME, AND ELECTROCONDUCTIVE PASTE USING SAME