Title:
METHOD AND APPARATUS FOR MEASURING SWITCHING CHARGE OF FERROELECTRIC TRANSISTOR
Document Type and Number:
WIPO Patent Application WO/2023/022453
Kind Code:
A1
Abstract:
An apparatus for measuring a switching charge according to an embodiment of the present invention, comprises: a voltage applying unit for applying a voltage pulse of a predetermined frequency to a gate of a transistor including a gate oxide; a source measure unit (SMU) for measuring an average direct current flowing at least one between a well and a source of the transistor and between the well and a drain of the transistor in response to the voltage pulse; and a processor for calculating a switching charge on the basis of the measured average direct current, wherein the gate oxide may include ferroelectrics.
Inventors:
NAM KAB JIN (KR)
KWON KEE WON (KR)
CHOI BYOUNG DEOG (KR)
KWON KEE WON (KR)
CHOI BYOUNG DEOG (KR)
Application Number:
PCT/KR2022/012138
Publication Date:
February 23, 2023
Filing Date:
August 12, 2022
Export Citation:
Assignee:
RESEARCH ＆ BUSINESS FOUNDATION SUNGKYUNKWAN UNIV (KR)
International Classes:
G01R19/165; G01R19/00; G01R31/26; G01R31/3181; H01L29/78
Foreign References:
| KR100304668B1 | 2001-11-07 | |||
| JP2006079801A | 2006-03-23 | |||
| JP2004265984A | 2004-09-24 | |||
| JP2005322889A | 2005-11-17 | |||
| JP2008026028A | 2008-02-07 |
Attorney, Agent or Firm:
FIRSTLAW P.C. (KR)
Download PDF:
Previous Patent: PHOTOSENSITIVE RESIN COMPOSITION AND DISPLAY DEVICE
Next Patent: SPEAKER MODULE AND ELECTRONIC DEVICE COMPRISING SAME
Next Patent: SPEAKER MODULE AND ELECTRONIC DEVICE COMPRISING SAME