Title:
METHOD AND APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM
Document Type and Number:
WIPO Patent Application WO/2022/118711
Kind Code:
A1
Abstract:
A method and apparatus for producing a long transparent barrier film, which has stable barrier properties and color by stably adjusting the degree of oxidation and the film thickness to desired values, comprises a step for producing a transparent gas barrier film which has, on at least one surface of a plastic film, an aluminum oxide layer that is mainly composed of aluminum oxide or a silicon oxide layer that is mainly composed of silicon oxide, said aluminum or silicon oxide layer being produced by evaporating aluminum metal or silicon metal and injecting oxygen thereinto. In this step, the film thickness of the thus-formed aluminum oxide layer or silicon oxide layer is measured by a film thickness gauge using X ray fluorescence and the light transmittance of the thus-formed aluminum oxide layer or silicon oxide layer is measured by a light transmittance measuring device so as to control the film thickness and the light transmittance to be at predetermined values.
Inventors:
ISEKI KIYOSHI (JP)
Application Number:
PCT/JP2021/043002
Publication Date:
June 09, 2022
Filing Date:
November 24, 2021
Export Citation:
Assignee:
TOYO BOSEKI (JP)
International Classes:
C23C14/24; B32B9/00; C23C14/08
Domestic Patent References:
| WO2019031262A1 | 2019-02-14 | |||
| WO2020241621A1 | 2020-12-03 |
Foreign References:
| JP2001192810A | 2001-07-17 | |||
| JP2007290291A | 2007-11-08 | |||
| JP2003105527A | 2003-04-09 | |||
| JPH05339704A | 1993-12-21 | |||
| JPH10330915A | 1998-12-15 | |||
| JP2638797B2 | 1997-08-06 | |||
| JP2007290292A | 2007-11-08 | |||
| JPH0860346A | 1996-03-05 | |||
| JP4427695B2 | 2010-03-10 |
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