Title:
METHOD AND APPARATUS FOR RECOVERING RARE GAS
Document Type and Number:
WIPO Patent Application WO/1999/028023
Kind Code:
A1
Abstract:
A method of and an apparatus for recovering a rare gas, capable of efficiently recovering a rare gas discharged from equipment using the rare gas, stably supplying the rare gas of a predetermined purity to the same equipment and reducing the consumption of the rare gas, wherein, when the rare gas in an exhaust gas discharged from the rare gas-using equipment operated under vacuum is recovered, the introducing of the exhaust gas into a recovery system is switched to/from the discharging of the same gas to an exhaust system under a vacuum condition, this switching operation being carried out in accordance with the concentration of the impurity components contained in the exhaust gas and the operational condition of the rare gas-using equipment.
Inventors:
OHMI TADAHIRO (JP)
ISHIHARA YOSHIO (JP)
ISHIHARA YOSHIO (JP)
Application Number:
PCT/JP1998/005335
Publication Date:
June 10, 1999
Filing Date:
November 27, 1998
Export Citation:
Assignee:
NIPPON OXYGEN CO LTD (JP)
OHMI TADAHIRO (JP)
ISHIHARA YOSHIO (JP)
OHMI TADAHIRO (JP)
ISHIHARA YOSHIO (JP)
International Classes:
B01D53/00; B01J3/00; C01B23/00; C23C16/44; B01D53/46; (IPC1-7): B01J3/02; C01B23/00; H01L21/285; H01L21/205; H01L21/203; C23C16/50; C23F4/00
Foreign References:
| JPH09251981A | 1997-09-22 | |||
| JPH0225989B2 | 1990-06-06 | |||
| JPH0929002A | 1997-02-04 |
Other References:
See also references of EP 0983791A4
Attorney, Agent or Firm:
Kido, Kazuhiko (Kajicho 1-chome Chiyoda-ku Tokyo, JP)
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