METHOD AND APPARATUS FOR SEPARATING AND RECOVERING PERFLUORO COMPOUND

Title:

METHOD AND APPARATUS FOR SEPARATING AND RECOVERING PERFLUORO COMPOUND

Document Type and Number:

WIPO Patent Application WO/2001/045826

Kind Code:

A1

Abstract:

A method for separating and recovering a PFC which comprises pressurizing a diluted, mixed gas comprising a PFC gas and a dilution gas to a high pressure, contacting the resultant gas with a membrane having a higher permeability for the dilution gas than that for the PFC gas, to thereby separate into a permeated gas stream rich in the dilution gas and an unpermeated gas stream rich in the PFC gas, contacting the above unpermeated gas stream with a membrane having the above-mentioned function, to thereby again separate into another permeated gas stream and another unpermeated gas stream, measuring the pressure or flow rate of the above another permeated gas stream, controlling the flow rate of the above unpermeated gas stream so as for the above another permeated gas stream to have a constant value, and recovering the above unpermeated gas stream; and an apparatus for use in the method. The method can be employed for recovering a PFC gas after the above treatment being stabilized in its concentration, even when there is a variation in the concentration of a diluted, mixed gas to be treated, and further requires no expensive analyzers for concentration.

Inventors:

KAWASAKI FUMIO (JP)
MATSUBAYASHI RYOSUKE (JP)

Application Number:

PCT/JP2000/008949

Publication Date:

June 28, 2001

Filing Date:

December 18, 2000

Export Citation:

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Assignee:

DAIDO AIR PRODUCTS ELECTRONICS (JP)
KAWASAKI FUMIO (JP)
MATSUBAYASHI RYOSUKE (JP)

International Classes:

B01D53/22; C07C17/38; (IPC1-7): B01D53/22; C07C17/38; C07C19/08

Foreign References:

JP2000218126A	2000-08-08
US5785741A	1998-07-28
EP0839568A1	1998-05-06
US4906256A	1990-03-06
US4857082A	1989-08-15
US5064446A	1991-11-12
US5281253A	1994-01-25

Other References: