Title:
METHOD AND APPARATUS FOR SUPPLYING HYDROGEN SELENIDE MIXED GAS FOR SOLAR CELLS
Document Type and Number:
WIPO Patent Application WO/2011/045983
Kind Code:
A1
Abstract:
Disclosed is a method for supplying hydrogen selenide mixed gas for solar cells, wherein the method involves a process for supplying the hydrogen selenide mixed gas, which has been adjusted to a prescribed concentration by mixing an inactive gas supplied from a base gas supply channel (L1) and a 100% hydrogen selenide gas supplied from a source gas supply channel (L2). The aforementioned base gas supply channel (L1) and the aforementioned source gas supply channel (L2) are equipped with a bypass channel (L7) providing communication therebetween. The hydrogen selenide mixed gas with a prescribed concentration is adjusted by drawing the aforementioned inactive gas from the aforementioned source gas supply channel (L2) via the aforementioned bypass channel (L7) after a prescribed amount of the aforementioned 100% hydrogen selenide gas has been drawn from the aforementioned source gas supply channel (L2), and the volume concentration of hydrogen selenide remaining in the aforementioned source gas supply channel (L2) is reduced to no more than 10%.
Inventors:
ITO YOSHINORI (JP)
TAKAHASHI YASUHIRO (JP)
TAKAHASHI YASUHIRO (JP)
Application Number:
PCT/JP2010/064598
Publication Date:
April 21, 2011
Filing Date:
August 27, 2010
Export Citation:
Assignee:
TAIYO NIPPON SANSO CORP (JP)
ITO YOSHINORI (JP)
TAKAHASHI YASUHIRO (JP)
ITO YOSHINORI (JP)
TAKAHASHI YASUHIRO (JP)
International Classes:
C01B19/04; H01L31/04
Foreign References:
| JP2008543563A | 2008-12-04 | |||
| JP2008013414A | 2008-01-24 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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