Title:
METHOD BY WHICH RESONANT MEMS ACCELEROMETER PROVIDES COMPENSATED ACCELERATION OUTPUT
Document Type and Number:
WIPO Patent Application WO/2024/034781
Kind Code:
A1
Abstract:
Provided is a method by which a resonant accelerometer comprising a resonator provides a compensated acceleration output. The present method may comprise the steps of: determining a first resonant frequency of the resonator without applying acceleration to the accelerator; determining a scale factor for the resonator; applying acceleration to the accelerometer and determining a second resonant frequency of the resonator in response; determining the amount of change in frequency by using the first resonant frequency and the second resonant frequency; and providing a compensated acceleration output by using the first resonant frequency, the amount of change in frequency, and the scale factor.
Inventors:
JUNG HYOUNG KYOON (KR)
CHANG BYUNG SU (KR)
JANG WOO HYUP (KR)
PARK KYU CHEOL (KR)
CHANG BYUNG SU (KR)
JANG WOO HYUP (KR)
PARK KYU CHEOL (KR)
Application Number:
PCT/KR2023/005999
Publication Date:
February 15, 2024
Filing Date:
May 03, 2023
Export Citation:
Assignee:
MICROINFINITY CO LTD (KR)
International Classes:
G01P21/02; B81B7/00; G01P15/08; G01P15/097; G01P15/125
Foreign References:
| KR20040050399A | 2004-06-16 | |||
| KR20130035427A | 2013-04-09 | |||
| US20210140994A1 | 2021-05-13 | |||
| KR20110116884A | 2011-10-26 |
Other References:
University of Ulsan.), 김승엽. 고배율 값을 갖는 공진형 정밀 마이크로 가속도 센서의 설계. 울산대학교 대학원
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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