Title:
METHOD FOR CALIBRATING TEMPERATURE-MEASURING SUBSTRATE, SYSTEM FOR MEASURING SUBSTRATE TEMPERATURE, AND TEMPERATURE-MEASURING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2024/062887
Kind Code:
A1
Abstract:
[Problem] To improve efficiency of temperature measurement using a temperature-measuring substrate. [Solution] This method for calibrating a temperature-measuring substrate that comprises a plurality of temperature-measuring resistors and has electrodes disposed corresponding to each of the plurality of temperature-measuring resistors comprises: a step for bringing a stylet into contact with an electrode that corresponds to at least one of the temperature-measuring resistors; a step for immersing the temperature-measuring substrate into an insulating refrigerant; a step for measuring, by the stylet, the electrical resistance value of the temperature-measuring resistor, via the electrode; a step for measuring the temperature of the insulating refrigerant; and a step for acquiring a correction value for converting the measured electrical resistance value into the measured temperature of the insulating refrigerant.
Inventors:
OTA TOMOHIRO (JP)
Application Number:
PCT/JP2023/031710
Publication Date:
March 28, 2024
Filing Date:
August 31, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01K15/00
Domestic Patent References:
| WO2022023336A1 | 2022-02-03 |
Foreign References:
| JP2020191399A | 2020-11-26 | |||
| JP2012231040A | 2012-11-22 | |||
| US20050054125A1 | 2005-03-10 | |||
| JP2005252225A | 2005-09-15 | |||
| JPH10160597A | 1998-06-19 | |||
| JP2007187619A | 2007-07-26 | |||
| JP2002064050A | 2002-02-28 |
Attorney, Agent or Firm:
BECCHAKU Shigehisa et al. (JP)
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