Title:
METHOD AND CIRCUIT ARRANGEMENT FOR THE PRECISE, DYNAMIC DIGITAL CONTROL OF ESPECIALLY PIEZOELECTRIC ACTUATORS FOR MICROPOSITIONING SYSTEMS
Document Type and Number:
WIPO Patent Application WO2005017634
Kind Code:
A3
Abstract:
The invention relates to a method and to a circuit arrangement for the precise, dynamic digital control of especially piezoelectric actuators for micropositioning systems, comprising a regulator, whereby, in order to minimize position order deviations, the future system behavior is estimated and current correction signals for the purpose of feedforward correction are obtained. The aim of the invention is to reduce latency times in the feedforward loop of the scanner system. For this purpose, the signal of the command variable is passed over a switched bypass to a high-resolution digital-to-analog converter, said converter being operated at the scan rate of the scanner system. The feedforward loop leads to a fast digital-to-analog converter which is controlled in a scanner system-independent manner. The output signals of the converters representing the control voltages are added to the device to be controlled, especially they are forwarded to a piezoelectric actuator which together with the position sensor forms the controlled system.
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Inventors:
GEYER BERNHARD (DE)
BESCH BERTHOLD (DE)
JORDAN SCOTT (US)
BESCH BERTHOLD (DE)
JORDAN SCOTT (US)
Application Number:
PCT/EP2004/008695
Publication Date:
June 23, 2005
Filing Date:
August 03, 2004
Export Citation:
Assignee:
PHYSIK INSTR PI GMBH & CO KG (DE)
GEYER BERNHARD (DE)
BESCH BERTHOLD (DE)
JORDAN SCOTT (US)
GEYER BERNHARD (DE)
BESCH BERTHOLD (DE)
JORDAN SCOTT (US)
International Classes:
G05B19/35; H01L41/04; (IPC1-7): G05B19/35
Foreign References:
| US6308106B1 | 2001-10-23 | |||
| DE19923462C1 | 2000-11-16 |
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