Title:
METHOD FOR CLEANING MEMBRANE DEGASSING DEVICES AND SYSTEM FOR PRODUCING ULTRAPURE WATER
Document Type and Number:
WIPO Patent Application WO/2020/209036
Kind Code:
A1
Abstract:
Provided are a method for efficiently cleaning membrane degassing devices without removing the membrane degassing device from the system for producing ultrapure water, and a system for producing ultrapure water to which this cleaning method can be applied. The method for cleaning a membrane degassing device 5 that is provided in a system for producing ultrapure water comprising a preprocessing means, a primary pure water producing unit, and a secondary pure water producing unit alternately performs a forward washing step of cleaning the membrane degassing device 5 by cleaning water flowing into the membrane degassing device 5 in the same direction that the water to be processed flows through the membrane degassing device 5 and a reverse washing step of cleaning the membrane degassing device 5 by the cleaning water flowing into the membrane degassing device 5 in the direction opposite to the direction that the water to be processed flows through the membrane degassing device 5. The system for manufacturing ultrapure water comprises the preprocessing means, the primary pure water producing unit, and the secondary pure water producing unit, and has the membrane degassing device 5 and a prescribed cleaning means in the primary pure water producing unit or the secondary pure water producing unit.
Inventors:
IIYAMA MASAMITSU (JP)
MIYAZAWA HIROKI (JP)
MIYAZAWA HIROKI (JP)
Application Number:
PCT/JP2020/012615
Publication Date:
October 15, 2020
Filing Date:
March 23, 2020
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK (JP)
International Classes:
B01D19/00; B01D61/00; B01D61/44; B01D65/02; B01D65/06; C02F1/44; C02F1/469
Domestic Patent References:
| WO2016117024A1 | 2016-07-28 |
Foreign References:
| JP2001170630A | 2001-06-26 | |||
| JP2005288336A | 2005-10-20 | |||
| JPH08266807A | 1996-10-15 | |||
| JPH07313845A | 1995-12-05 | |||
| JPH1157415A | 1999-03-02 | |||
| JP2007090249A | 2007-04-12 | |||
| JP2000126559A | 2000-05-09 |
Attorney, Agent or Firm:
SAKURA PATENT OFFICE, P.C. (JP)
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