Title:
METHOD FOR COATING GRAPHITE BASE MATERIAL USING HYBRID COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/182306
Kind Code:
A1
Abstract:
The present invention relates to a silicon carbide coating method capable of economically forming a high-quality silicon carbide coating layer on a graphite base material by a simple process using equipment having a simpler structure and safer raw materials. More specifically, the silicon carbide coating method comprises: a) a step of supporting solid silicon on a porous carrier; b) a step of preparing a first silicon carbide coating layer by loading, into a vacuum chamber, a graphite base material for coating and the porous carrier on which solid silicon is supported and then by heat treating same at 1,400 ℃ to 2,000 ℃; and c) a step of depositing a second silicon carbide coating layer onto the top of the first silicon carbide coating layer via a chemical vapor deposition method.
Inventors:
KIM SEOG JIN (KR)
Application Number:
PCT/KR2019/003103
Publication Date:
September 26, 2019
Filing Date:
March 18, 2019
Export Citation:
Assignee:
CARBONEX CO LTD (KR)
International Classes:
C23C28/04; C23C8/20; C23C16/02; C23C16/32
Foreign References:
| KR20150057420A | 2015-05-28 | |||
| KR20150074790A | 2015-07-02 | |||
| KR100760336B1 | 2007-09-20 | |||
| KR20150091823A | 2015-08-12 | |||
| KR20120070282A | 2012-06-29 |
Attorney, Agent or Firm:
OAM PATENT & TRADEMARK LAW FIRM (KR)
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