Title:
METHOD FOR CONTROLLING POSITION OF SAMPLE IN CHARGED PARTICLE BEAM DEVICE, PROGRAM, STORAGE MEDIUM, CONTROL DEVICE, AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/240801
Kind Code:
A1
Abstract:
A scanning/transmission electron microscope (1) moves a sample (59) using an X-piezoelectric element (54), a Y-piezoelectric element (55), and a Z-piezoelectric element (65). The method for controlling the position of the sample (59) comprises: a first movement step for moving the sample (59) toward a target position; a second movement step for moving the sample (59) away from the target position, following the first movement step; and a third movement step for moving the sample (59) toward the target position, following the second movement step.
Inventors:
ISHIZAWA KAZUKI (JP)
Application Number:
PCT/JP2020/021395
Publication Date:
December 02, 2021
Filing Date:
May 29, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2013118170A | 2013-06-13 | |||
| JP2003108228A | 2003-04-11 | |||
| JPH06147883A | 1994-05-27 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
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