Title:
METHOD FOR CONTROLLING SYNCHRONIZATION WHEN APPLYING DC POWER OF PULSE PLASMA
Document Type and Number:
WIPO Patent Application WO/2011/105873
Kind Code:
A2
Abstract:
Disclosed is a method for controlling synchronization when applying DC power of pulse plasma. The method for controlling synchronization when applying DC power of pulse plasma according to the present invention involves applying DC power in accordance with the on/off periods of RF pulse power, such that minus (-) power periods and plus (+) power periods can be adjusted, thereby generating plasma suitable for each process and achieving maximized process efficiency.
Inventors:
YEOM GEUN YOUNG (KR)
KANG SE KOO (KR)
JEON MIN HWAN (KR)
PARK JONG YUN (KR)
PARK BYOUNG JAE (KR)
YEON JE KWAN (KR)
KANG SE KOO (KR)
JEON MIN HWAN (KR)
PARK JONG YUN (KR)
PARK BYOUNG JAE (KR)
YEON JE KWAN (KR)
Application Number:
PCT/KR2011/001400
Publication Date:
September 01, 2011
Filing Date:
February 28, 2011
Export Citation:
Assignee:
UNIV SUNGKYUNKWAN FOUND (KR)
YEOM GEUN YOUNG (KR)
KANG SE KOO (KR)
JEON MIN HWAN (KR)
PARK JONG YUN (KR)
PARK BYOUNG JAE (KR)
YEON JE KWAN (KR)
YEOM GEUN YOUNG (KR)
KANG SE KOO (KR)
JEON MIN HWAN (KR)
PARK JONG YUN (KR)
PARK BYOUNG JAE (KR)
YEON JE KWAN (KR)
International Classes:
H01L21/3065; H01L21/8247; H01L27/115
Foreign References:
| KR20090084694A | 2009-08-05 | |||
| KR20070022781A | 2007-02-27 | |||
| KR100750420B1 | 2007-08-21 |
Attorney, Agent or Firm:
E-SANG PATENT & TRADEMARK LAW FIRM (KR)
특허법인 이상 (KR)
특허법인 이상 (KR)
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Claims: