Title:
METHOD AND DEVICE FOR CONTROL OF THE DATA FLOW ON APPLICATION OF RETICLES IN A SEMICONDUCTOR COMPONENT PRODUCTION
Document Type and Number:
WIPO Patent Application WO2003025678
Kind Code:
A3
Abstract:
The invention relates to a method and a device for control of the data flow on application of reticles in a semiconductor component production, characterised in that the reticles each have a unique structured reticle data set, whereby the content of the reticle data set can be automatically altered and/or completed, depending on the production process for a semiconductor component. The application of reticles in a semiconductor component production can thus be efficiently controlled.
Inventors:
ALBRECHT THOMAS (DE)
HAASE NORBERT (DE)
HAFFNER HENNING (DE)
JAEHNERT CARMEN (DE)
KRONEFELD OLAF (DE)
STIEGLER MANFRED (DE)
HAASE NORBERT (DE)
HAFFNER HENNING (DE)
JAEHNERT CARMEN (DE)
KRONEFELD OLAF (DE)
STIEGLER MANFRED (DE)
Application Number:
PCT/DE2002/003196
Publication Date:
October 09, 2003
Filing Date:
August 28, 2002
Export Citation:
Assignee:
INFINEON TECHNOLOGIES AG (DE)
ALBRECHT THOMAS (DE)
HAASE NORBERT (DE)
HAFFNER HENNING (DE)
JAEHNERT CARMEN (DE)
KRONEFELD OLAF (DE)
STIEGLER MANFRED (DE)
ALBRECHT THOMAS (DE)
HAASE NORBERT (DE)
HAFFNER HENNING (DE)
JAEHNERT CARMEN (DE)
KRONEFELD OLAF (DE)
STIEGLER MANFRED (DE)
International Classes:
G03F1/00; G03F7/20; H01L21/027; (IPC1-7): G03F7/20
Foreign References:
| US6077632A | 2000-06-20 | |||
| US5396312A | 1995-03-07 | |||
| EP1184724A1 | 2002-03-06 |
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