Title:
METHOD AND DEVICE FOR POLISHING THROUGH FLOW PASSAGE IN THREE-DIMENSIONAL STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2017/203946
Kind Code:
A1
Abstract:
Provided is a method for polishing a through flow passage with which it is possible to polish a through flow passage in a three-dimensional structure more appropriately without using a cylinder. In this method, a through flow passage is subjected to a polishing treatment by causing a polishing fluid including abrasive particles and a liquid to flow through the through flow passage. Particularly, the polishing fluid is extracted from a bottom part of a sealed container loaded with the polishing fluid, and is sent to the through flow passage.
Inventors:
WATANABE SHINYA
ABE SATOSHI
TANAKA KENICHI
UCHINONO YOSHIYUKI
MORI MIKIO
OOHARA TAKETO
MORIMOTO MASANORI
NAKAMURA AKIFUMI
ABE SATOSHI
TANAKA KENICHI
UCHINONO YOSHIYUKI
MORI MIKIO
OOHARA TAKETO
MORIMOTO MASANORI
NAKAMURA AKIFUMI
Application Number:
PCT/JP2017/017166
Publication Date:
November 30, 2017
Filing Date:
May 01, 2017
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
B24B31/00
Foreign References:
JP2005059115A | 2005-03-10 | |||
JP2004114241A | 2004-04-15 | |||
JP2011101937A | 2011-05-26 | |||
JPS5662717U | 1981-05-27 | |||
JP2011067902A | 2011-04-07 | |||
JP2016179515A | 2016-10-13 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
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