METHOD AND DEVICE FOR PRODUCING ELECTRICALLY CONDUCTIVE CONTINUITY IN SEMICONDUCTOR COMPONENTS

WIPO Patent Application WO1998059098

A3

The invention relates to a process and a device for the production of electrically conductive passages in semiconductor components preferably positioned on a semiconductor, by means of thermo-migration through the production of a temperature gradient between two opposing outer surfaces of the semiconductor components and application of a conductive doping substance to a cooler outer surface. One outer surface of the semiconductor is positioned on a cooled sample take-up and the opposing outer surface is exposed to heat radiation, which can be controlled both with regard to its total efficiency and its efficiency distribution over the surface of the semiconductor. The total efficiency and/or the efficiency distribution of the heat radiation is adjusted depending upon the temperature measured on at least one temperature measurement point on the semiconductor and/or a semiconductor component.

KRIEGEL BERND (DE)
KUDELLA FRANK (DE)
ARNOLD RENE (DE)

PCT/DE1998/001768

March 18, 1999

June 22, 1998

Click for automatic bibliography generation  

HEIDENHAIN GMBH DR JOHANNES (DE)
SILICON SENSOR GMBH (DE)
KRIEGEL BERND (DE)
KUDELLA FRANK (DE)
ARNOLD RENE (DE)

C30B13/02; H01L21/00; H01L21/22; H01L21/225; H01L21/24; H01L23/52; H01L21/3205; H01L21/768; H01L23/48; H01L31/02; H01L31/0224; H01L31/10; (IPC1-7): C30B13/02; H01L21/24; H01L31/0224; H01L21/768; H01L23/48

WO1983003710A1

1983-10-27

US4221956A	1980-09-09
US4224504A	1980-09-23
EP0101762A1	1984-03-07
US4141757A	1979-02-27
US4159215A	1979-06-26
US4157564A	1979-06-05
US4101759A	1978-07-18
US4097226A	1978-06-27

View/Download PDF      PDF Help

Previous Patent: MAKING MONOCRYSTALS IN THE FORM OF PLATES BY GROWTH IN A SOLUTION

Next Patent: PREPARING CELLULOSE MICROFILAMENTS AND MICROFIBRES