Title:
METHOD AND DEVICE FOR PRODUCING ULTRAPURE WATER
Document Type and Number:
WIPO Patent Application WO/2022/239483
Kind Code:
A1
Abstract:
Provided are a method and device for producing ultrapure water in which, after pure water is passed through a UV oxidation device, said pure water is channeled through an ion exchange device and then through a sub-system, wherein it is possible to raise the efficiency of breaking down organic matter in the UV oxidation device. Specifically, provided is a method for producing ultrapure water using an ultrapure water production apparatus having a pre-treatment device 2, a primary pure water device 4, and a sub-system 20, wherein primary pure water from the primary pure water device 4 is subjected to a de-aeration treatment by a de-aeration membrane device 7 such that the DO concentration after de-aeration is 20-80 ppb, after which said pure water is channeled through a UV oxidizer 11 and an ion exchange device 12 and then supplied to the sub-system 20.
Inventors:
GOTO HIDEKI (JP)
Application Number:
PCT/JP2022/013092
Publication Date:
November 17, 2022
Filing Date:
March 22, 2022
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
B01D19/00; B01D61/00; C02F1/32; C02F1/42; C02F1/44; C02F9/02; C02F9/06; C02F9/08; C02F9/12
Domestic Patent References:
| WO2018092831A1 | 2018-05-24 |
Foreign References:
| JPH10174804A | 1998-06-30 | |||
| JPH06312175A | 1994-11-08 |
Attorney, Agent or Firm:
SHIGENO, Tsuyoshi et al. (JP)
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