METHOD AND DEVICE FOR SURFACE TREATMENT OF TREATED OBJECT

Title:

METHOD AND DEVICE FOR SURFACE TREATMENT OF TREATED OBJECT

Document Type and Number:

WIPO Patent Application WO/2003/042434

Kind Code:

A1

Abstract:

A method and a device for the surface treatment of a treated object, the method comprising the steps of leading surface treating fluid into a reaction tank (4) capable of storing the treated object, applying surface treatment to the treated object, leading the surface treating fluid into a separating tank (14), and circulating the surface treating fluid, after contaminants are removed, into the reaction tank (4), wherein, when the treated object is surface−treated, the circulating routes of the surface treating fluid including the reaction tank (4) are allowed to communicate with each other to always circulate the surface treating fluid in the circulating routes, whereby the method and the device can be suitably used for electrochemical treatment of the treated object, a contact between the treated object and the atmosphere can be avoided, the surface of the treated object can be accurately and uniformly activated, metal ions can be satisfactorily deposited, the supply and discharge of the surface treating fluid and treating fluid can be reasonably performed, the effective use of these fluids and the discharge thereof to the outside of a system can be stopped, a reasonable system, an increase in productivity, and a mass−production can be realized, an electrochemical treatment operation can be reasonably and safely performed, a reduction in size and cost of equipment can be performed, and maintenance can be conveniently performed.

More Like This:

JP2928086	REMAINS WASHING AND SEPARATING DEVICE
JPH0817271	INDUSTRIAL APPLICABILITY: A mounting printed circuit board cleaning system and a method for detecting a solvent replacement time thereof.
JPH0529210	METHOD OF EXFOLIATING PHOTOSENSITIVE RESIST LAYER

Inventors:

YOSHIDA HIDEO (JP)
MIYATA SEIZO (JP)
SONE MASATO (JP)
SATO NOBUYOSHI (JP)

Application Number:

PCT/JP2002/011203

Publication Date:

May 22, 2003

Filing Date:

October 29, 2002

Export Citation:

Click for automatic bibliography generation Help

Assignee:

YOSHIDA HIDEO (JP)
ASAHI ENGINEERING (JP)
MYATA SEIZO (JP)
SONE MASATO (JP)
SATO NOBUYOSHI (JP)

International Classes:

B08B3/14; C23C18/16; C25D5/00; C25D5/08; C25D17/00; C25D21/00; H01L21/288; H01L21/306; H01L21/3213; (IPC1-7): C25D17/00

Foreign References:

JPH1036999A	1998-02-10
JPH076267U	1995-01-27
JPH0243399A	1990-02-13

Other References: