Title:
METHOD AND DEVICE FOR SYNTHESIZING HIGH ORIENTATIONALLY ARRANGED CARBON NANO−TUBE BY USING ORGANIC LIQUID
Document Type and Number:
WIPO Patent Application WO/2003/000590
Kind Code:
A1
Abstract:
A method and a device for synthesizing a high orientationally arranged carbon nano−tube by using organic liquid, the method comprising the steps of depositing a film formed of metal elements on a substrate, exposing the substrate (3) having the film deposited thereon to hydrogen plasma, and heating the substrate (3) exposed to the hydrogen plasma to a specified temperature in the organic liquid (10), the device comprising a water cooling means (2) for cooling a liquid container (1) installed on the outside of the liquid container (1), a substrate holder (5) having electrodes (4) for holding the substrate (3) and flowing a current to the substrate (3), a condensing means (7) comprising water cooling pipes (6) for returning organic liquid vapor evaporated from the liquid container (1) after cooling and condensing, and a cover (9) for holding the substrate holder (5), the condensing means (7), and a valve (8) for leading N2 gas, wherein the organic liquid (10) is sealingly held by the liquid container (1) and the cover (9), whereby a large amount of carbon nano−tube can be synthesized safely at a low cost.
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Inventors:
ANDO TOSHIHIRO (JP)
GAMO MIKA (JP)
ZHANG YAFEI (JP)
GAMO MIKA (JP)
ZHANG YAFEI (JP)
Application Number:
PCT/JP2002/006235
Publication Date:
January 03, 2003
Filing Date:
June 21, 2002
Export Citation:
Assignee:
JAPAN SCIENCE & TECH CORP (JP)
NAT INST FOR MATERIALS SCIENCE (JP)
ANDO TOSHIHIRO (JP)
GAMO MIKA (JP)
ZHANG YAFEI (JP)
NAT INST FOR MATERIALS SCIENCE (JP)
ANDO TOSHIHIRO (JP)
GAMO MIKA (JP)
ZHANG YAFEI (JP)
International Classes:
B01J10/00; C01B31/02; (IPC1-7): C01B31/02
Domestic Patent References:
| WO1999065821A1 | 1999-12-23 | |||
| WO1999065821A1 | 1999-12-23 |
Other References:
HERNADI KLARA ET AL.: "production of nanotubes by the catalytic decomposition of different carbon-containing compounds", APPLIED CATALYSIS A: GENERAL, vol. 199, no. 2, 2000, pages 245 - 255, XP004272375
KUSUNOKI M. ET AL.: "Formation of self-aligned carbon nanotube films by surface decomposition of silicon carbide", PHILOSOPHICAL MAGAZINE LETTERS, vol. 79, no. 4, 1999, pages 153 - 161, XP000827523
YAFEI ZHANG ET AL.: "A novel synthesis method for aligned carbon nanotubes in organic liquids", JPN. J. APPL. PHYS-, vol. 41, April 2002 (2002-04-01), pages L408 - L411, XP002957313
Y.C. CHOI ET AL.: "Effect of surface morphology of Ni thin film on the growth of aligned carbon nanotubes by microwave plasma-enhanced chemical vapor deposition", JOURNAL OF APPLIED PHYSICS, vol. 88, 2000, pages 4898 - 4903
M. KUSUNOKI ET AL.: "Formation of self-aligned carbon nanotube films by surface decomposition of silicon carbide", PHILOSOPHICAL MAGAZINE LETTERS, vol. 79, no. 4, 1999, pages 153 - 161
See also references of EP 1413550A4
KUSUNOKI M. ET AL.: "Formation of self-aligned carbon nanotube films by surface decomposition of silicon carbide", PHILOSOPHICAL MAGAZINE LETTERS, vol. 79, no. 4, 1999, pages 153 - 161, XP000827523
YAFEI ZHANG ET AL.: "A novel synthesis method for aligned carbon nanotubes in organic liquids", JPN. J. APPL. PHYS-, vol. 41, April 2002 (2002-04-01), pages L408 - L411, XP002957313
Y.C. CHOI ET AL.: "Effect of surface morphology of Ni thin film on the growth of aligned carbon nanotubes by microwave plasma-enhanced chemical vapor deposition", JOURNAL OF APPLIED PHYSICS, vol. 88, 2000, pages 4898 - 4903
M. KUSUNOKI ET AL.: "Formation of self-aligned carbon nanotube films by surface decomposition of silicon carbide", PHILOSOPHICAL MAGAZINE LETTERS, vol. 79, no. 4, 1999, pages 153 - 161
See also references of EP 1413550A4
Attorney, Agent or Firm:
Hirayama, Kazuyuki (Shinjukugyoen Bldg. 2-3-10, Shinjuk, Shinjuku-ku Tokyo, JP)
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