Title:
METHOD AND DEVICES FOR COLD PLASMA CLEANING OF THE SURFACE OF A METAL, CERAMIC OR POLYMER WORKPIECE
Document Type and Number:
WIPO Patent Application WO2003097259
Kind Code:
A3
Abstract:
The invention concerns a method for cleaning the surface of a metal, ceramic or polymer workpiece (4, 12), which consists in immersing said workpiece in cold plasma. The invention is characterized in that it consists in intermittently imposing on said workpiece a polarization or self-polarization, so as to produce during the periods of polarization or self-polarization of the workpiece (4, 12) disintegration of the impurities present on the surface of the workpiece during the periods when it is noted that said plasma does not produce said cleaning effect solely by chemical effect. The invention also concerns devices for implementing said method.
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Inventors:
BELMONTE THIERRY (FR)
CZERWIEC THIERRY (FR)
THIEBAUT JEAN-MARIE (FR)
MICHEL HENRI (FR)
CZERWIEC THIERRY (FR)
THIEBAUT JEAN-MARIE (FR)
MICHEL HENRI (FR)
Application Number:
PCT/FR2003/001440
Publication Date:
March 25, 2004
Filing Date:
May 12, 2003
Export Citation:
Assignee:
CENTRE NAT RECH SCIENT (FR)
BELMONTE THIERRY (FR)
CZERWIEC THIERRY (FR)
THIEBAUT JEAN-MARIE (FR)
MICHEL HENRI (FR)
BELMONTE THIERRY (FR)
CZERWIEC THIERRY (FR)
THIEBAUT JEAN-MARIE (FR)
MICHEL HENRI (FR)
International Classes:
B08B7/00; (IPC1-7): B08B7/00
Foreign References:
| US5507874A | 1996-04-16 | |||
| US5824375A | 1998-10-20 |
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