METHOD FOR THE ELECTRICAL PASSIVATION OF ELECTROMECHANICAL COMPONENTS

Title:

METHOD FOR THE ELECTRICAL PASSIVATION OF ELECTROMECHANICAL COMPONENTS

Document Type and Number:

WIPO Patent Application WO/2013/026764

Kind Code:

A3

Abstract:

The invention relates to a method for the electrical passivation of electromechanical components which comprise at least one electrode (20), a ceramic layer (80) being applied to the surface to be passivated by way of aerosol deposition of ceramic particles. Preferably, the components are piezoelectric multilayer components having passivating ceramic layers of 5 to 20 μm thickness of a material that corresponds to the piezoelectric layers.

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Inventors:

DENNELER STEFAN (DE)
SCHUH CARSTEN (DE)
STEINKOPFF THORSTEN (DE)
WOLFF ANDREAS (DE)

Application Number:

PCT/EP2012/066008

Publication Date:

May 16, 2013

Filing Date:

August 16, 2012

Export Citation:

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Assignee:

SIEMENS AG (DE)
DENNELER STEFAN (DE)
SCHUH CARSTEN (DE)
STEINKOPFF THORSTEN (DE)
WOLFF ANDREAS (DE)

International Classes:

H01L41/053

Foreign References:

US20050179345A1	2005-08-18
US20070247782A1	2007-10-25
EP1808906A2	2007-07-18

Attorney, Agent or Firm:

SIEMENS AKTIENGESELLSCHAFT (München, DE)

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