Title:
METHOD AND EQUIPMENT FOR GROWING SINGLE CRYSTALS
Document Type and Number:
WIPO Patent Application WO/1996/033301
Kind Code:
A1
Abstract:
A method and equipment for growing single crystals according to the so-called Czochralski process. The method comprises attaching a seed crystal (12) to the tip of a wire (41a) of a lifting device (41), pulling up a single crystal portion (15) for crystal growth while engaging an arm-shaped member (44a) of a supporting device (44) with a recess (16) of unevennesses (14) formed on the side of the single crystal portion (15), synchronizing the pulling rate of the member (44a) with that of the wire (41a) to smoothen the cooperation of the both, and pulling up the single crystal portion (15) at a constant pulling rate. Heavy single crystals can safely be pulled up without causing dislocation while minimizing the shock to the growing crystals.
Inventors:
IINO EIICHI (JP)
NAKAMURA YASUSHI (JP)
OTSUKA SEIICHIRO (JP)
MIDZUISHI KOJI (JP)
KIMURA MASANORI (JP)
YAMAGISHI HIROTOSHI (JP)
NAKAMURA YASUSHI (JP)
OTSUKA SEIICHIRO (JP)
MIDZUISHI KOJI (JP)
KIMURA MASANORI (JP)
YAMAGISHI HIROTOSHI (JP)
Application Number:
PCT/JP1996/001089
Publication Date:
October 24, 1996
Filing Date:
April 22, 1996
Export Citation:
Assignee:
SHINETSU HANDOTAI KK (JP)
IINO EIICHI (JP)
NAKAMURA YASUSHI (JP)
OTSUKA SEIICHIRO (JP)
MIDZUISHI KOJI (JP)
KIMURA MASANORI (JP)
YAMAGISHI HIROTOSHI (JP)
IINO EIICHI (JP)
NAKAMURA YASUSHI (JP)
OTSUKA SEIICHIRO (JP)
MIDZUISHI KOJI (JP)
KIMURA MASANORI (JP)
YAMAGISHI HIROTOSHI (JP)
International Classes:
C30B15/22; C30B15/30; C30B15/20; C30B29/06; (IPC1-7): C30B15/30; C30B15/20
Foreign References:
| JPH05270975A | 1993-10-19 | |||
| JPH05319987A | 1993-12-03 | |||
| JPH0565477B1 | 1993-09-17 | |||
| JPS5325717B2 | 1978-07-28 | |||
| JPH03285893A | 1991-12-17 | |||
| JPS59232989A | 1984-12-27 |
Other References:
See also references of EP 0826796A4
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