METHOD FOR FILLING CONCAVE PORTIONS IN CONCAVE/CONVEX PATTERN AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

WIPO Patent Application WO/2005/064598

A1

There are provided a method for filling concave portions in a concave/convex pattern capable of effectively filling the concave portions in the concave/convex pattern and surely flattening the surface and a magnetic recording medium manufacturing method capable of effectively manufacturing a magnetic recording medium having a magnetic recording layer of concave/convex pattern and having a sufficiently flat surface. On the surface of a work (10) having a concave/convex pattern, a film of filling material (36) is formed for filling the concave portions (34). Further, on the filling material (36), a film of coating material (42) is formed. By using the dry etching method having an etching rate for the coating material (42) lower than the etching rate for the filling material (36), a surplus of the filling material (36) and the coating material (42) is removed from the surface of the magnetic recording layer (32), thereby making the surface flat.

SUWA TAKAHIRO (JP)
HATTORI KAZUHIRO (JP)
OKAWA SHUICHI (JP)
HIBI MIKIHARU (JP)

PCT/JP2004/019109

July 14, 2005

December 21, 2004

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TDK CORP (JP)
SUWA TAKAHIRO (JP)
HATTORI KAZUHIRO (JP)
OKAWA SHUICHI (JP)
HIBI MIKIHARU (JP)

G11B5/855; (IPC1-7): G11B5/84; H01L21/3065

JPH0653189A	1994-02-25
JPH0236529A	1990-02-06
JPH11260772A	1999-09-24
JP2001167420A	2001-06-22
JPH0997419A	1997-04-08
JP2003157520A	2003-05-30
JPH0340219A	1991-02-21
JPH02280326A	1990-11-16
JP2001267422A	2001-09-28
JP2002026117A	2002-01-25
JPH10275808A	1998-10-13

Matsuyama, Keisuke (10-12 Yoyogi 2-chome, Shibuya-k, Tokyo 53, JP)

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