Title:
METHOD OF FORMING METAL BLANKS FOR SPUTTERING TARGETS
Document Type and Number:
WIPO Patent Application WO2004074530
Kind Code:
A3
Abstract:
The present invention relates to an improvement in the manufacture of metal blanks, discs, and sputtering targets by flattening only one of the two surfaces of a metal plate. The elimination of flattening the metal plate's second surface results in a significant cost reduction. The metal plate of the present invention preferably has a single-side flatness of 0.005 inches or less, which improves the reliability of the bond between the target blank and a backing plate. Preferred metals include, but are not limited to, tantalum, niobium, titanium, and alloys thereof. The present invention also relates to machining the first side of a metal plate, bonding the first side to a backing plate, and then optionally machining the second side of the metal plate.
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Inventors:
MICHALUK CHRISTOPHER A (US)
Application Number:
PCT/US2004/004021
Publication Date:
December 09, 2004
Filing Date:
February 11, 2004
Export Citation:
Assignee:
CABOT CORP (US)
MICHALUK CHRISTOPHER A (US)
MICHALUK CHRISTOPHER A (US)
International Classes:
C22F1/00; C23C14/34; (IPC1-7): C22F1/00; C23C14/34
Domestic Patent References:
| WO1996033294A1 | 1996-10-24 | |||
| WO2002088412A2 | 2002-11-07 | |||
| WO1999061670A1 | 1999-12-02 |
Foreign References:
| GB1483195A | 1977-08-17 | |||
| US6071389A | 2000-06-06 |
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