Title:
METHOD FOR FORMING PRODUCT STRUCTURE HAVING POROUS REGIONS AND LATERAL ENCAPSULATION
Document Type and Number:
WIPO Patent Application WO/2020/144223
Kind Code:
A3
Abstract:
Method for forming product structure having porous regions and lateral encapsulation A method for fabricating a structure, the structure comprising: - an insulating layer (201), - a first metal layer (203) above a first portion of the insulating layer, - a first porous region of anodic oxide, above and in contact with the first metal layer, and - a second porous region of anodic oxide, surrounding the first porous region, in contact with a second portion of the insulating layer adjacent to the first portion of the insulating layer, and in contact with the first metal layer, the second porous region forming an insulating region.
Inventors:
VOIRON FRÉDÉRIC (FR)
SOULIER BRIGITTE (FR)
PARAT GUY (FR)
SOULIER BRIGITTE (FR)
PARAT GUY (FR)
Application Number:
PCT/EP2020/050295
Publication Date:
September 17, 2020
Filing Date:
January 08, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
COMMISSARIAT ENERGIE ATOMIQUE (FR)
COMMISSARIAT ENERGIE ATOMIQUE (FR)
International Classes:
H01L23/522; C25D11/02; C25D11/04; H01G4/10; H01L49/02
Foreign References:
| US20160268144A1 | 2016-09-15 | |||
| US20020105086A1 | 2002-08-08 | |||
| US3864217A | 1975-02-04 | |||
| US20140268491A1 | 2014-09-18 | |||
| US8901711B1 | 2014-12-02 |
Other References:
PARAG BANERJEE ET AL: "Nanotubular metal-insulator-metal capacitor arraysfor energy storage", NATURE NANOTECHNO, NATURE PUBLISHING GROUP, LONDON, GB, vol. 4, no. 5, 1 January 2009 (2009-01-01), pages 292 - 296, XP009144550, ISSN: 1748-3387
Attorney, Agent or Firm:
CABINET BEAU DE LOMENIE (FR)
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