Title:
METHOD FOR FORMING OF SILICEOUS FILM AND SILICEOUS FILM FORMED USING SAME
Document Type and Number:
WIPO Patent Application WO/2014/080841
Kind Code:
A1
Abstract:
A siliceous film having high purity and a low etching rate is formed by: (a) a step for forming a siliceous film on a substrate by coating a solution composed of a polysilazane, e.g., perhydropolysilazane on a substrate and then hardening (curing) the solution in an oxidizing atmosphere, or by coating a silica solution formed by a sol-gel method on a substrate; and (b) a step for heating the siliceous film in an inert gas environment containing a nitrogen-containing compound such as alkyalmine having a base disassociation constant (pKb) no greater than 4.5, or a halogen-containing compound in which the bond energy of a halogen atom such as F2, Br2, or NF3 is no greater than 60 kcal/mol, in order to anneal the film.
Inventors:
HAYASHI MASANOBU (JP)
NAGAHARA TATSURO (JP)
NAGAHARA TATSURO (JP)
Application Number:
PCT/JP2013/080886
Publication Date:
May 30, 2014
Filing Date:
November 15, 2013
Export Citation:
Assignee:
AZ ELECTRONIC MATERIALS MFG JAPAN KK (JP)
International Classes:
C01B33/12; H01L21/316; H01L21/768
Domestic Patent References:
| WO1997024391A1 | 1997-07-10 |
Foreign References:
| JPH09183663A | 1997-07-15 | |||
| JP2009206440A | 2009-09-10 | |||
| JPH01132128A | 1989-05-24 | |||
| JP2004327793A | 2004-11-18 | |||
| JP3178412B2 | 2001-06-18 | |||
| JP2001308090A | 2001-11-02 | |||
| JPS60145903A | 1985-08-01 | |||
| JPS6189230A | 1986-05-07 | |||
| JPS4969717A | 1974-07-05 | |||
| JPS6316325B2 | 1988-04-08 |
Other References:
D. SEYFERTH ET AL., COMMUNICATION OF AM. CER. SOC., vol. C-13, January 1983 (1983-01-01)
D. SEYFERTH ET AL., POLYM. PREPR. AM. CHEM. SOC., DIV. POLYM. CHEM., vol. 25, 1984, pages 10
D. SEYFERTH ET AL., COMMUNICATION OF AM. CER. SOC., vol. C-132, July 1984 (1984-07-01)
See also references of EP 2924717A4
D. SEYFERTH ET AL., POLYM. PREPR. AM. CHEM. SOC., DIV. POLYM. CHEM., vol. 25, 1984, pages 10
D. SEYFERTH ET AL., COMMUNICATION OF AM. CER. SOC., vol. C-132, July 1984 (1984-07-01)
See also references of EP 2924717A4
Attorney, Agent or Firm:
KANAO HIROKI (JP)
鐘尾 Hiroki (JP)
鐘尾 Hiroki (JP)
Download PDF: