Title:
METHOD FOR MANUFACTURING CONDUCTIVE MEMBER
Document Type and Number:
WIPO Patent Application WO/2020/095656
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a conductive member for use in electrical inspections, which is compatible with the miniaturization of electronic components. The method comprises: an electrode part formation step of forming electrode parts (3) respectively in a plurality of through-holes (2) in a glass substrate (1) having the through-holes (2) formed therein; a resin material layer formation step of forming a resin material layer on a surface (11) of the glass substrate (1); a via hole formation step of forming via holes at parts respectively corresponding to upper parts of the electrode parts (3) in the resin material layer formed on the glass substrate (1); a filling step of filling a conductive elastic material in the via holes; a semi-hardening step of semi-hardening the conductive elastic material; a detachment step of detaching the resin material layer (6); an insulation part formation step of forming insulation parts (5) on the surface (11) of the glass substrate (1) using an insulating elastic material; and a hardening step of hardening the insulation parts (5) together with the conductive elastic material.
Inventors:
SUGIYAMA YASUSHI (JP)
Application Number:
PCT/JP2019/041140
Publication Date:
May 14, 2020
Filing Date:
October 18, 2019
Export Citation:
Assignee:
NOK CORP (JP)
International Classes:
H01L23/32; H01B13/00; H01R11/01; H01R43/00; H05K1/11; H05K3/40
Domestic Patent References:
| WO2009060755A1 | 2009-05-14 |
Foreign References:
| JPH0536755A | 1993-02-12 | |||
| JPH05218149A | 1993-08-27 | |||
| JP2000156119A | 2000-06-06 | |||
| JPH11214594A | 1999-08-06 | |||
| JP2015501427A | 2015-01-15 |
Attorney, Agent or Firm:
EINSEL Felix-Reinhard et al. (JP)
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