Title:
METHOD FOR MANUFACTURING DIAMOND SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2020/111790
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a diamond substrate, and the method for manufacturing a diamond substrate, of the present invention, is a method using a photoresist pattern and a heat treatment and the like for an air gap formation film material so as to form, on a substrate such as sapphire (Al2O3), an air gap structure having a crystalline correlation with a lower substrate, and then grow a diamond. The method simplifies a process during the heterogeneous growth of large-area/large-diameter single crystal diamond and lowers costs, and mitigates the stress caused by a difference in lattice constants and thermal expansion coefficients between a heterogeneous substrate and diamond and reduces defects or cracks even during drops in temperature, thereby manufacturing a single crystal diamond substrate with high quality and facilitating self-separation of the diamond substrate from the heterogeneous substrate.
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Inventors:
NAM OK HYUN (KR)
CHOI UI HO (KR)
YOO GEUN HO (KR)
CHOI UI HO (KR)
YOO GEUN HO (KR)
Application Number:
PCT/KR2019/016511
Publication Date:
June 04, 2020
Filing Date:
November 27, 2019
Export Citation:
Assignee:
KOREA POLYTECHNIC UNIV INDUSTRY ACADEMIC COOPERATION FOUNDATION (KR)
International Classes:
H01L21/02; H01L21/027; H01L21/324
Foreign References:
| KR20060001015A | 2006-01-06 | |||
| JP2011157268A | 2011-08-18 | |||
| KR100763467B1 | 2007-10-04 | |||
| KR101053116B1 | 2011-08-01 | |||
| KR19990019532A | 1999-03-15 |
Attorney, Agent or Firm:
SON, Ki Ho (KR)
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