Title:
METHOD FOR MANUFACTURING ELECTRONIC DEVICE AND METHOD FOR REMOVING IMPURITY USING SAME
Document Type and Number:
WIPO Patent Application WO/2018/164522
Kind Code:
A1
Abstract:
Provided are a method for manufacturing an electronic device capable of efficiently utilizing a material and a method for removing impurities using same. The method for manufacturing an electronic device comprises the steps of: placing a transfer film on a plurality of functional layers which are positioned apart from each other on a source substrate; bringing a first transfer target into close contact with the lower surface of the transfer film by applying pressure to a portion of the transfer film that corresponds to the first transfer target from among the plurality of functional layers by using a probe; separating the transfer film from the source substrate in a state in which the first transfer target is in close contact with the lower surface; placing the transfer film on a target substrate in the state in which the first transfer target is in close contact with the lower surface; placing the first transfer target on the target substrate by applying pressure to a portion of the transfer film that corresponds to the first transfer target; and separating the transfer film from the target substrate in a state in which the first transfer target is positioned on the target substrate.
Inventors:
LEE SANG WOOK (KR)
SHIN DONG HOON (KR)
SHIN DONG HOON (KR)
Application Number:
PCT/KR2018/002798
Publication Date:
September 13, 2018
Filing Date:
March 09, 2018
Export Citation:
Assignee:
UNIV EWHA IND COLLABORATION (KR)
International Classes:
H01L51/00; H01L21/322; H01L51/05
Domestic Patent References:
WO2014123319A1 | 2014-08-14 |
Foreign References:
JP2004319460A | 2004-11-11 | |||
JP2004200572A | 2004-07-15 | |||
KR20170011770A | 2017-02-02 | |||
KR101303930B1 | 2013-09-05 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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