Title:
METHOD FOR MANUFACTURING FINE CANTILEVER
Document Type and Number:
WIPO Patent Application WO/2016/017866
Kind Code:
A1
Abstract:
A method for manufacturing a fine cantilever having a cantilever and a probe provided on the cantilever can comprise the steps of: providing a probe mold having a groove, which accommodates a liquid-state probe solution for the probe and corresponds to the shape of the probe; making the cantilever come into contact with the probe mold having the groove by corresponding to the probe position; forming the probe on the cantilever by hardening the probe solution accommodated in the groove in a state in which the cantilever makes contact with the probe mold; and separating the cantilever from the probe mold.
Inventors:
LEE JUNG CHUL (KR)
SONG JUNG KI (KR)
LEE IL (KR)
SONG JUNG KI (KR)
LEE IL (KR)
Application Number:
PCT/KR2014/012112
Publication Date:
February 04, 2016
Filing Date:
December 10, 2014
Export Citation:
Assignee:
UNIV SOGANG IND UNIV COOP FOUN (KR)
International Classes:
G01Q70/16
Foreign References:
| KR20080028725A | 2008-04-01 | |||
| JPH06150807A | 1994-05-31 | |||
| KR20110015973A | 2011-02-17 | |||
| JP2006119024A | 2006-05-11 | |||
| JP2003035723A | 2003-02-07 |
Attorney, Agent or Firm:
JI, HYON JO (KR)
지현조 (KR)
지현조 (KR)
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