METHOD OF MANUFACTURING FINE CERAMIC PARTICLES AND APPARATUS THEREFOR

WIPO Patent Application WO/1994/014530

A1

The present invention provides a method of manufacturing fine ceramic particles, comprising the steps of supplying a raw gas or raw liquid droplets to a reaction space provided in an annular portion between the stationary outer cylinder and the rotatable inner cylinder of a double coaxial cylindrical reactor, and subjecting the raw gas or raw liquid droplets to a reaction in the reaction space while rotating the inner cylinder. The present invention also provides an apparatus used to practice this method. A Taylor vortex is employed as a fluid flow in a CVD reaction zone or a thermal decomposition reaction zone. Consequently, the temperature distribution in the vortex, the concentration distribution of the reaction gas or concentration distribution in terms of the number of liquid droplets, and the residence time of formed fine particles confined in the vortex become uniform, and uniform fine ceramic particles can be obtained with a high yield.

JPS6094135	MANUFACTURE OF ULTRAFINE CERAMIC POWDER
JPS5751127	GROWTH OF SEMICONDUCTOR OF COMPOUND OF 3-5 GROUP IN GASEOUS PHASE

OSHIMA KENTARO (JP)
NUMATA TOSHIHARU (JP)
NISHIMURA TORU (JP)
KOKUBO SACHIKO (JP)
TSUTO KEIICHI (JP)

PCT/JP1993/001889

July 07, 1994

December 24, 1993

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KAO CORP (JP)
OSHIMA KENTARO (JP)
NUMATA TOSHIHARU (JP)
NISHIMURA TORU (JP)
KOKUBO SACHIKO (JP)
TSUTO KEIICHI (JP)

B01J12/02; B01J19/00; B01J19/18; C01B13/20; C01B13/34; C01G9/03; C01G23/07; C23C16/44; C23C16/455; (IPC1-7): B01J19/00; B01J12/02; B01J14/00

JPS56139122A	1981-10-30
JPH0410376B2	1992-02-25
JPH0435215B2	1992-06-10
JPS6329582B2	1988-06-14
JPS6346002B2	1988-09-13
JPS63319045A	1988-12-27

See also references of EP 0677326A4

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