Title:
METHOD FOR MANUFACTURING FINE METAL MASK
Document Type and Number:
WIPO Patent Application WO/2023/182837
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a fine metal mask, the method comprising the steps of: a) patterning a plated resist on a substrate; b) forming a metal plated layer on the substrate exposed through the patterned plated resist; c) removing the patterned plated resist after step b); and d) separating the metal plated layer and the substrate, wherein, in step a), the depth of focus of light for exposure is controlled so that the plated resist has a trapezoidal cross-sectional shape.
Inventors:
LEE SANG MIN (KR)
KWON YOUNG DUCK (KR)
YOO BYONG WOOK (KR)
KIM KI SOO (KR)
MOON JONG TAIK (KR)
MOON SEUNG IL (KR)
HYUN DA SOM (KR)
KWON YOUNG DUCK (KR)
YOO BYONG WOOK (KR)
KIM KI SOO (KR)
MOON JONG TAIK (KR)
MOON SEUNG IL (KR)
HYUN DA SOM (KR)
Application Number:
PCT/KR2023/003880
Publication Date:
September 28, 2023
Filing Date:
March 23, 2023
Export Citation:
Assignee:
GRAPHENELAB CO LTD (KR)
International Classes:
C25D1/10; C23C14/04; G03F7/20; H10K71/16
Foreign References:
| KR20180049778A | 2018-05-11 | |||
| KR20200042163A | 2020-04-23 | |||
| KR20190050680A | 2019-05-13 | |||
| KR20120085042A | 2012-07-31 | |||
| KR20180028868A | 2018-03-19 | |||
| KR102442666B1 | 2022-09-13 |
Attorney, Agent or Firm:
TAEDONG PATENT & LAW FIRM (KR)
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