Title:
METHOD FOR MANUFACTURING HARD CARBON-BASED COATING, AND COATED MEMBER
Document Type and Number:
WIPO Patent Application WO/2019/065225
Kind Code:
A1
Abstract:
The method for manufacturing a hard carbon-based coating according to the present invention comprises: a step A for preparing a coating-forming apparatus having a power source device and a discharge electrode containing a carbon material, and preparing a substrate comprising a surface on which the coating is to be formed; and a step B for using the coating-forming apparatus to repeatedly discharge between the discharge electrode and the substrate in a prescribed coating formation atmosphere, thereby forming a hard carbon-based coating on the surface. Step B is performed under conditions such that the coating formation atmosphere and/or the discharge electrode contains at least one of hydrogen atoms, oxygen atoms, water molecules, and carbon dioxide molecules.
Inventors:
NISHIBAYASHI YOSHIKI (JP)
MAEDA SHIGEKI (JP)
MAEDA SHIGEKI (JP)
Application Number:
PCT/JP2018/033716
Publication Date:
April 04, 2019
Filing Date:
September 11, 2018
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES (JP)
D N A METAL COMPANY LTD (JP)
D N A METAL COMPANY LTD (JP)
International Classes:
C23C26/00; B23B27/14; B23B27/20; C23C14/00; C23C14/06
Domestic Patent References:
| WO1999058744A1 | 1999-11-18 |
Foreign References:
| JPS5879807A | 1983-05-13 | |||
| JP2002115080A | 2002-04-19 |
Other References:
OSADA, MINORU ET AL.: "Application of Raman spectroscopy to characterization of carbon-based materials:Recent advances and their applications to nano-carbons", TANSO, 2007, pages 174 - 184, XP055584270
Attorney, Agent or Firm:
YAMANO Hiroshi (JP)
Download PDF: