Title:
METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2010/013765
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a magnetic recording medium, wherein the magnetic recording medium can be surely planarized without grinding a recording magnetic layer.
A manufacturing apparatus having a stop layer forming chamber (116), an embedding layer forming chamber (117), a first etching chamber (118) and a second etching chamber (119) is used, and the following steps are executed; a step of forming a recording magnetic layer with an uneven pattern, a step of filling a recessed section of the recording magnetic layer by forming an embedding layer composed of a nonmagnetic material in the recessed section, an etching step of removing an excess embedding layer by etching, and a step of forming a film of a nonmagnetic material as a stop layer prior to the etching step.
Inventors:
YAMANAKA KAZUTO (JP)
SHIBAMOTO MASAHIRO (JP)
SHIBAMOTO MASAHIRO (JP)
Application Number:
PCT/JP2009/063543
Publication Date:
February 04, 2010
Filing Date:
July 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
YAMANAKA KAZUTO (JP)
SHIBAMOTO MASAHIRO (JP)
YAMANAKA KAZUTO (JP)
SHIBAMOTO MASAHIRO (JP)
International Classes:
G11B5/84
Foreign References:
| JP2006318648A | 2006-11-24 | |||
| JP2007220196A | 2007-08-30 | |||
| JPH08274142A | 1996-10-18 |
Attorney, Agent or Firm:
WATANABE Keisuke et al. (Mitsui Sumitomo Ginko Okachimachi Bldg. 11-4, Taito 4-chome, Taito-k, Tokyo 16, JP)
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